Ultra Precision Nanoscale
Optical Elements Customized Expert
| Processing scope and technical indicators (customizable) | |
| Diameter | φ5 - φ200 |
| Process(spherical、plane) | etching, photolithography |
| Line accuracy | ± 0.5μm |
| Line width | Etching less than 3μm photolithography less than 2μm |
| Surface quality | Etching better than 20/10 photolithography better than 20/10 |
|
Material |
H-K9L/BAK7/B270/JGS1/Ge/Si/ZnSe/Metal |
|
Coating |
Chrome /Antireflection /Al/customizable |
| Application | Metering, calibrating |